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David G. Goodwin
Professor of Mechanical Engineering and Applied
Physics
B.S., Harvey Mudd College, 1979; M.S., Stanford University,
1980; Ph.D., Stanford University, 1986
1200 East California Boulevard
Pasadena, CA 91125
MC 104-44
(626) 395-4249
(626) 568-2719 (fax)
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Research
Much of Professor Goodwin's research concerns the growth of thin
films by chemical vapor deposition (CVD), which is an important
process for the manufacture of integrated circuits, semiconductor
lasers, micro-electrical-mechanical systems (MEMS) devices, optical
components, and many other products. Research in this area is interdisciplinary,
drawing on the fields of heat transfer, fluid mechanics, control,
chemistry, and materials science, among others.
Work in Professor Goodwin's group combines experiment and modeling,
both of which are necessary to understand complex processes like
CVD. Most members of this research group are currently involved
in a large-scale, interdisciplinary project focused on deposition
of thin films of the high-temperature superconductor YBCO and related
oxides. Work in this area includes experimental studies of film
growth, development of in-situ spectroscopic diagnostic methods,
atomistic simulation of film growth processes, and development
of simulation tools that couple models for flow, chemistry, film
growth, sensors, and control.
Other current interests include hot-wire CVD of amorphous hydrogenated
silicon, CVD of diamond films, the coupling of particle and continuum
methods in reacting flow simulations, and the development of advanced
software tools for studying such flows.
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